Applications

Semiconductor devices are all around us. They can be found in just about every commercial product we touch, from the family car to your smartphone and even the washer and drier. The material the devices are made from varies greatly. Revasum’s equipment is highly effective at processing the following applications.

CMP Typical uses Revasum System
Oxides Dielectrics, insulators, MEMS, gap fill, STI, passivation 6DS-SP,6EC,6EG
Nitrides Dielectrics, insulators, spacers, MEMS, STI, passivation 6DS-SP,6EC,6EG
Polysilicon Contacts, gates, structural MEMS, local interconnect, high voltage, low current 6DS-SP,6EC,6EG
Tungsten Vias, contacts, local interconnect, work function metal 6DS-SP,6EC,6EG
Copper Interconnect metalization, power, vias, dual damascene, TSV, RDL 6DS-SP
Aluminum Interconnect metalization, power, reflective optics 6DS-SP,6EC,6EG
Barrier metals (Ta, Ti, TiN, etc.) Diffusion barrier, glue layer, work function metal, capping layer 6DS-SP,6EC,6EG
Polymers Dielectric, insulation, low-k, ultralow-k, flowable gapfill 6DS-SP,6EC,6EG
SUBSTRATE POLISHING Typical uses Revasum System
Silicon (prime) Semiconductor devices, CMOS, linear, RF, epi substrate, Si interposer, MEMS 6DZ
SOI Semiconductor devices, CMOS, low leakage, full depletion mode 6DS-SP,6EC,6EG
GaAs High frequency, amplifier, direct bandgap, LED, low noise detector, solid state laser 6DS-SP,6EC,6EG
Other III-V (InP, GaP, etc.) High frequency, amplifier, LED, low noise detector, solid state laser 6DS-SP,6EC,6EG
SiC High voltage, power electronics, wide bandgap, HBLED, electric vehicles 6DS-SP,6EC,6EG
GaN High voltage, power electronics, GaN on sapphire, HBLED, electric vehicles 6DS-SP,6EC,6EG
Sapphire LED, HBLED, optics, GaN on sapphire, optics, windows, UV transmission 6DS-SP,6EC,6EG
Quartz Rigid substrate, window, cap, direct bond, back illumination detector 6DS-SP,6EC,6EG
Grinding Typical uses Revasum System
Silicon CMOS, SOI, linear, RF, wafer shape, backside thinning, small form factor 7AF, 7AF-II
GaAs High frequency, amplifier, direct bandgap, LED, low noise detector, solid state laser 7AF, 7AF-II
Other III-V (InP, GaP, etc.) High frequency, amplifier, LED, low noise detector, solid state laser 7AF, 7AF-II
SiC (wire sawn, lapped, smooth) High voltage, power electronics, wide bandgap, HBLED, electric vehicles 7AF-HMG
GaN High voltage, power electronics, GaN on sapphire, HBLED, electric vehicles 7AF-HMG
Sapphire LED, HBLED, optics, GaN on sapphire, optics, windows, UV transmission 7AF-HMG
Quartz Rigid substrate, window, cap, backside thinning, back illumination detector 7AF-HMG
LiNbO3, LiTaO3 Optical modulator, piezoelectric, surface acoustic wave, telecommunications 7AF, 7AF-II
Piezoelectric (PZT) Ceramic perovskite, ultrasound transducer, high voltage, capacitor 7AF, 7AF-II
Ceramics/Glass Rigid substrate, window, cap, insulator, structural frame 7AF, 7AF-II

Revasum

825 BUCKLEY,

SAN LUIS OBISPO, CA  93401

 

Phone: (805) 541-6424

Email:   info@revasum.com

 

 

Copyright © 2008  Revasum.  All rights reserved

Revasum

825 BUCKLEY,

SAN LUIS OBISPO, CA  93401

 

Phone: (805) 541-6424

Email:   info@revasum.com